Interests
Applied Physics, particularly involving x-ray optics, the generation of coherent radiation at EUV and x-ray wavelengths, and applications to nanoscale imaging.
Classes Taught
- X-rays and Extreme Ultraviolet Radiation Bcourses AST 210/EE 213. Online lectures at https://www.youtube.com/playlist?list=PLW6lmkTQ3FQWUqnuvY3st_nu4VtwOaFFx
- For class text and slides go to www.cambridge.org/xrayeuv
Recent Students and Research Areas
Dr. Brittany McClinton (Intel), “Mask Roughness Induced Line-Edge Roughness in Extreme Ultraviolet Lithography”, EECS. (Ph.D. 12/2011)
Dr. Ryan Miyakawa (LBNL), “Wavefront Metrology for High Resolution Optical Systems”, AS&T. (Ph.D. 5/2011)
Dr. Brooke Lu Mesler (Lam Research), “Nanoscale Studies of Spin Dynamics in Patterned Magnetic Materials Using Soft X-Ray Transmission Microscopy”, AS&T. (Ph.D. 8/2010)
Dr. Christopher Anderson (LBNL), “Extreme Ultraviolet Lithography: A Few More Pieces of the Puzzle”, AS&T. (Ph.D. 5/2009)
Dr. Andrew Aquila (SLAC), “Development of EUV and Soft X-ray Multilayer Optics for Scientific Studies with Femtosecond/Attosecond Sources”, AS&T. (Ph.D. 5/2009)
Dr. Anne Sakdinawat (SLAC/Stanford), “Contrast and Resolution Enhancement Techniques for Soft X-ray Microscopy”, Bioengineering. (Ph.D. 5/2008)
Dr. Weilun Chao (Lawrence Berkeley National Lab), “Resolution Characterization and Nanofabrication for Soft X-ray Zone Plate Microscopy”, EECS. (Ph.D. 5/2005)
Dr. Kristine Rosfjord (University of Maryland), “Tunable Coherent Radiation at Soft X-ray Wavelengths: Generation and Interferometric Applications,” EECS. (Ph.D. 7/2004)
Dr. Yanwei Liu (SLAC), “Coherence Properties of EUV/Soft X-ray Sources,” AS&T. (Ph.D. 12/2003)
Dr. Chang Chang (University of California, San Diego), “Coherence Techniques at EUV Wavelengths,” EECS. (Ph.D. 12/2002)
Dr. John Heck (Intel), “Optics for High Resolution X-ray Microscopy,” Applied Science and Technology. (M.S. 6/1997)
Dr. Gregory Denbeaux (Albany Nanotech), “Soft X-ray Biomicroscopy”. (with Prof. John Madey, Duke University, and Dr. Werner Meyer-Ilse, LBNL)
Dr. Regina Soufli (Lawrence Livermore National Lab), “Optical Constants of Materials in the EUV/Soft X-ray Region for Multilayer Mirror Applications,” EECS. (Ph.D. 12/1997)
Dr. Raul Beguiristain (Adelphi Technology), “Thermal Distortion Effects on Beam Line Optical Design for High Flux Synchroton Radiation,” Nuclear Engr. (Ph.D. 12/1997)
Dr. Max Wei (Intel), “Grating Based Soft X-ray Spatial Frequency Multiplication,” EECS. (Ph.D. 5/1995)
Dr. Khanh Nguyen (Google), “Reflective Masks for Extreme Ultraviolet Lithography,” EECS. (Ph.D. 5/1994)
Mr. Jason Dimkoff (Sandia National Lab), “Spectrographic Study of the EUV Electric Capillary Discharge Source,” EECS. (M.S. 5/2002)
Sample Publications
- I. A. Vartanyants, et al, “Coherence Properties of Individual Femtosecond Pulses of an X-Ray Free-Electron Laser,” Phys. Rev. Lett., 107, 144801, Sep. 2011.
- A. Sakdinawat and D. Attwood, “Nanoscale X-Ray Microscopy”, (Invited), Nature Photonics, (Dec 2010).
- D. Attwood, “Nanotomography Comes of Age”, Nature 442, 642 (10 August 2006).
- C. Chang, A. Sakdinawat, P. Fischer, E. Anderson, and D. Attwood, “Single-element Objective Lens for Soft-X-Ray Differential Interference Contrast Microscopy”, Opt. Lett. 31, 1564 (2006).
- W. Chao, B.H. Harteneck, J.A. Liddle, E.H. Anderson, D.T. Attwood. “Soft X-ray Microscopy at Spatial Resolution Better than 15 nm,” Nature 435, 1210 (2005).
- K. Rosfjord, Y. Liu and D. Attwood, “Tunable Coherent Soft X-rays,” IEEE JSTQE 10, 1405 (2004).
- R. Bartels et al., “Generation of Spatially Coherent Light at Extreme Ultraviolet Wavelengths”, Science 297, 376 (2002).
- Y. Liu et al., “Achievement of Essentially Full Spatial Coherence in a High-Average-Power Soft X-ray Laser,” Phys. Rev. A 63, 033802(2001).
- D. Attwood et al., “Tunable Coherent Radiation in the Soft X-ray and Extreme Ultraviolet Spectral Regions,” IEEE J. Quant. Electr. 35, 709 (1999).
- D. Attwood et al., “At-Wavelength Metrologies for Extreme Ultraviolet Lithography” (in Japanese), J. Fut. Electr. Dev. (Tokyo) 8, 17 (1997).
- D. Attwood, “New Opportunities at X-ray Wavelengths,” Physics Today, p. 24 (August 1992).
- D. Attwood, K. Halbach and K.-J. Kim, “Tunable Coherent X-rays,” Science 228, 1265 (14 June 1985).
- J. Underwood and D. Attwood, “The Renaissance of X-ray Optics,” Physics Today, p. 44 (April 1984).
Books
- D. Attwood and A. Sakdinawat, X-Rays and Extreme Ultraviolet Radiation: Principles and Applications (Cambridge University Press, February 2017).
- D. Attwood, Soft X-rays and Extreme Ultraviolet Radiation: Principles and Applications (Cambridge University Press, 1999)
- W. Meyer-Ilse, T. Warwick and D. Attwood, Editors, X-ray Microscopy (Amer. Instit. Physics, Washington D.C., 2000)
- F. Zernike and D. Attwood, Editors, EUV Lithography (OSA, Washington D.C., 1995)
- D. Attwood and J. Bokor, Editors, Short Wavelength Coherent Radiation (Amer. Instit. Physics, N.Y., 1986)
- D. Attwood and B. Henke, Editors, Low Energy X-ray Diagnostics (Amer. Instit. Physics, N.Y., 1981)